Sputtering Grade Niobium
Niobium targets are primarily employed in the reactive sputter deposition of niobium pentoxide (Nb2O5). Since impurities in the sputtering target can affect the optical properties of the Nb2O5 film, ZircoSCM offers a special high purity, target grade niobium for this market.
Chemical Purity of Sputtering and Commercial Grades | ||
Impurities (ppm) | Sputtering Grade Niobium | Commercial Grade Niobium |
Fe | <20 | <100 |
Ni | <25 | <50 |
Cr | <5 | <10 |
Cu | <5 | <10 |
Zr | <50 | <200 |
P | <30 | <30 |
Si | <30 | <50 |
Ta | <400 | <3000 |
W | <50 | <500 |
Mo | <50 | <300 |
Na | <3 | <10 |
Li | <5 | <10 |
K | <3 | <10 |
U | <0.1 | <10 |
Th | <0.1 | <10 |
Others | <10 | <10 |
C | <40 | <100 |
O | <150 | <200 |
N | <100 | <100 |
H | <15 | <15 |